Surface modification through chemical vapor deposition is becoming increasingly important in extending service life of many parts exposed to severe environmental conditions.
KEY FEATURES: Provides detailed descriptions of several novel methods of application of CVD technology.
DESCRIPTION: This reference book presents the basic principles and process characteristics of chemical vapor deposition, as well as the details of several innovative approaches to its application in a wide variety of industrial applications.
AUDIENCE: Process and applications engineers and researchers who are involved in deposition of surface coatings.
Introduction
Basic Principles, Thermodynamics, and Kinetics
Stresses and Mechanical Stability
Combustion Chemical Vapor Deposition
Polarized Electrochemical-Vapor Deposition
Chemical Vapor Infiltration
Metal-Organic CVD of High-Dielectric (Ba, Sr)TiO3 Thin Films for Dynamic
RAM Applications
CVD of Plastic and Polymers
CVD Diamond, Diamond-Like Carbon, and Carbonitride Coatings
CVD Films in Tribological Applications
CVD Films for Electrical-Insulation and Corrosion-Protection Coatings
Heat Treatment of CVD-Coated Tool Steels
Future Developments and Directions
