Thin Film Materials Technology : Sputtering of Compound Materials, 2nd Edition

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.

Chapter 1 : Thin Film Materials and Devices
Chapter 2 : Thin Film Process
Chapter 3 : Thin Film Growth Process
Chapter 4 : Thin Film Deposition Process
Chapter 5 : Characterization
Chapter 6 : Sputtering Phenomena
Chapter 7 : Sputtering Yield
Chapter 8 : Sputtering Atoms
Chapter 9 : Mechanisms of Sputtering
Chapter 10 : Sputtering Systems
Chapter 11 : Discharge in a Gas
Chapter 12 : Sputtering System
Chapter 13 : Practical Aspects of Sputtering System
Chapter 14 : Deposition of Compound Thin Films
Chapter 15 : Oxides
Chapter 16 : Nitrides
Chapter 17 : Carbides and Silicides
Chapter 18 : Diamond
Chapter 19 : Selenides
Chapter 20 : Amorphous Thin Films
Chapter 21 : Super-Lattice Structures
Chapter 22 : Organic Thin Films
Chapter 23 : Magnetron Sputtering Under a Strong Magentic Field
Chapter 24 : Structural Control of Compound Thin Films
Chapter 25 : Ferroelectric Materials and Structures
Chapter 26 : Control of Structure
Chapter 27 : Nanometer Structures
Chapter 28 : Interfacial Control
Chapter 29 : Microfabrication by Sputtering
Chapter 30 : Classification by Sputtering Etching
Chapter 31 : Ion Beam Sputter Etching
Chapter 32 : Diode Sputter Etching
Chapter 33 : Deposition into Deep Trench Structure
Chapter 34 : Appendices
Chapter 35 : Electric Units, Their Symbols and Conversion Factors
Chapter 36 : Fundamental Physical Constants

Index