While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and academic institutions around the world define subfields, offer practical instructions and examples, and pave the way for future research.
Helping readers to select the proper fabricating technique for their experiments, the book provides a broad vision of the most critical problems and explains how to solve them. It includes basic definitions and introduces the main underlying concepts of nanofabrication. The book also discusses the major advantages and disadvantages of each approach and offers a wide variety of examples of cutting-edge applications.
Each chapter focuses on a particular method or aspect of study. For every method, the contributors describe the underlying theoretical basis, resolution, patterns and substrates used, and applications. They show how applications at the nanoscale require a different process and understanding than those at the microscale. For each experiment, they elucidate key solutions to problems relating to materials, methods, and surface considerations.
A complete resource for this rapidly emerging interdisciplinary field, this handbook provides practical information for planning the experiments of any project that employs nanofabrication techniques. It gives readers a foundation to enter the complex world of nanofabrication and inspires the scientific community at large to push the limits of nanometer resolution.
Part I : Standard Lithography
Chapter 1 : Introduction to Nanofabrication
Chapter 2 : Electron Beam Lithography
Chapter 3 : Nanolithography with Focused Ion Beams
Chapter 4 : Focused Ion Beam and Electron Beam Deposition
Chapter 5 : Plasma-Assisted Pattern Transfer at the Nanoscale
Chapter 6 : Optical Lithography
Chapter 7 : Soft X-Ray Lithography
Chapter 8 : Simulations in Micro- and Nanofabrication
Part II : New Lithographic Techniques
Chapter 9 : Nanoimprint Lithography
Chapter 10 : Scanning Probe Lithography
Chapter 11 : Two-Photon Lithography
Chapter 12 : Colloidal Inorganic Nanocrystals: Synthesis and Controlled Assembly
Chapter 13 : Directed Self Assembly
Chapter 14 : Self-Assembled DNA Nanostructures and DNA Devices
Chapter 15 : Emerging New Approaches, Thomas Schenkel
Part III : Nanofabrication Applications
Chapter 16 : Nano-Electro-Mechanical Systems (NEMS)
Chapter 17 : Micro- and Nanofluidics
Chapter 18 : Fabrication of Nanophotonic Structures
Chapter 19 : Patterning Magnetic Nanostructures with Ions
Chapter 20 : Plasmonic Metamaterials
Chapter 21 : Nanoelectronics
Chapter 22 : Manipulation and Nanostructuring for Biological Applications
