This book offers a concise description of procedures for precision actuator modeling and control. It addresses four main schemes: modeling and control of precise actuators; nonlinear control of precise actuators, including sliding mode control and neural network feedback control; fault detection and fault-tolerant control; and advanced air bearing control. A substantial part of the book addresses application issues in the modeling and control of precise actuators, providing several interesting case studies for more application-oriented readers.
Preface
Chapter 1 : Introduction
Chapter 2 : Nonlinear Dynamics and Modeling
Chapter 3 : Identification and Compensation of Preisach Hysteresis in Piezoelectric Actuators
Chapter 4 : Identification and Compensation of Friction and Ripple Force
Chapter 5 : Model Predictive Control of Precise Actuators
Chapter 6 : Modeling and Control of Air Bearing Stages
Chapter 7 : Fault Detection and Accommodation in Actuators
Chapter 8 : Case Studies of Precise Actuator Applications
Index
