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	DIN ISO 15632 : 2022 Title: Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA) (ISO 15632:2021) Year: 2022 Publisher: DIN Availability: Within 1-2 working days

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