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MEMS : Introduction and Fundamentals, 2nd Edition

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Title: MEMS : Introduction and Fundamentals, 2nd Edition
Author: Mohamed Gad-el-Hak
ISBN: 0849391377 / 9780849391378
Format: Hard Cover
Pages: 488
Publisher: CRC Press
Year: 2006
Availability: In Stock
     
 
  • Description
  • Contents

As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.

The first of three volumes, MEMS: Introduction and Fundamentals covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field.

MEMS: Introduction and Fundamentals comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

Preface
Editor-in-Chief
Contributors

Chapter 1 : Introduction
Chapter 2 : Scaling of Micromechanical Devices
Chapter 3 : Mechanical Properties of MEMS Meterials
Chapter 4 : Flow Physics
Chapter 5. :Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains
Chapter 6 : Molecular-Based Microfluidic Simulation Models
Chapter 7 : Hydrodynamics of Small-Scale Internal Gaseous Flows
Chapter 8 : Burnett Simulations of Flow in Microdevices
Chapter 9 : Lattice Boltzmann Simulations of Slip Flow in Microchannels
Chapter 10 : Liquid Flows in Microchannels
Chapter 11 : Lubrication in MEMS
Chapter 12 : Physics of Thin Liquid Films
Chapter 13 : Bubble/Drop Transport in Microchannels
Chapter 14 : Fundamentals of Control Theory
Chapter 15 : Model-Based Flow Control for Distributed Architectures
Chapter 16 : Soft Computing in Control

Index

 
 
 
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