Monitoring hazardous gases is highly complex, yet critical to semiconductor manufacturing. This book includes excerpts from codes and standards relevant to the industry, including the latest editions of model fire codes. This guide provides the basics to successfully comply with code requirements.
The guidelines in this book go beyond minimum design standards to ensure that best industry practices are employed to address the many safety, environmental and economic concerns of hazardous occupancy facilities. System certification, redundancy and integration of gas sensors into a monitoring, control and alarm system are discussed.
This is a field-guide reference. It is spiral-bound for easier “benchtop” access to the information you need while setting up your gas monitoring systems. It is valuable to everyone involved in handling hazardous gases.
Figures & Tables
Caveat
Acknowledgments
Acronymns & Abbreviations
Chapter 1 : Hazardous Gas Monitoring
Chapter 2 : Regulated Materials
Chapter 3 : Summary of Hazardous Gas Monitoring Codes
Chapter 4 : Hazardous Gas Monitoring Sensors
Chapter 5 : Monitoring, Alarm and Control Systems
Chapter 6 : Monitoring Exhaust Treatment System Discharge
Chapter 7 : System Certification
Chapter 8 : Code Enforcement
Appendices
A : Table of Typically Monitored Gases
B : Zellweger Protocol for Testing Toxic Gas Detectors
C : UFC Table A-VI-A-1-Normalization Factor
D : Safety System Suppliers
Glossary
References
Index
