Due to their speed, data density, and versatility, optical metrology tools play important roles in today’s high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods.
The book first builds a foundation for evaluating optical measurement methods. It explores the many terms of optical metrology and compares it to other forms of metrology, such as mechanical gaging, highlighting the limitations and errors associated with each mode of measurement at a general level. This comparison is particularly helpful to current industry users who operate the most widely applied mechanical tools.
The book then focuses on each application area of measurement, working down from large area to medium-sized to submicron measurements. It describes the measurement of large objects on the scale of buildings, the measurement of durable manufactured goods such as aircraft engines and appliances, and the measurement of fine features on the micron and nanometer scales. In each area, the book covers fast, coarse measures as well as the finest measurements possible. Best practices and practical examples for each technology aid readers in effectively using the methods.
Requiring no prior expertise in optical dimensional metrology, this handbook helps engineers and quality specialists understand the capabilities and limitations of optical metrology methods. It also shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems.
Preface
Part I : Optical Metrology: Introduction
Chapter 1 : Optical Metrology Overview
Chapter 2 : Machine Vision for Metrology
Part II : Optical Metrology of Larger Objects
Chapter 3 : Laser Tracking Systems
Chapter 4 : Displacement Measuring Interferometry
Chapter 5 : Metrology of Large Parts
Part III : Optical Metrology of Medium-Size Objects
Chapter 6 : Portable Metrology
Chapter 7 : Phase-Shifting Systems and Phase-Shifting Analysis
Chapter 8 : Moire Measurement
Part IV : Optical Micro-Metrology of Small Objects
Chapter 9 : Automation in Interferometry
Chapter 10 : White-Light Interference 3D Microscopes
Chapter 11 : Focus-Based Optical Metrology
Part V : Advanced Optical Micro-Metrology Methods
Chapter 12 : Parallel Multifunctional System for MEMS/MOEMS and Microoptics Testing
Index
