Fundamentals of Microfabrication and Nanotechnology : From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications, 3rd Edition, Volume - 3

Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications details manufacturing techniques applicable to bio-nanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download.

* Focuses on applications of NEMS and MEMS
* Covers scaling laws, actuators, and fluidics
* Discusses top-down and bottom-up manufacturing methods
* Explains how to use nature as a guide
* Includes end-of-chapter problems as well as worked-out problems within the text
* Contains color illustrations throughout, extensive references for further reading, and a comprehensive glossary of terms

Solutions manual, PowerPoint lecture slides, and electronic figures available upon qualifying course adoption.

Roadmap
Author
Acknowledgments

Part I : From Traditional Manufacturing to Nanotechnology
Introction to Part I
Chapter 1 : Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared
Chapter 2 : Nature as an Engineering Guide : Biomimetics
Chapter 3 : Nanotechnology : Top-Down and Bottom-Up Manufacturing Approaches Compared
Chapter 4 : Packaging, Assembly, and Self-Assembly
Chapter 5 : Selected Materials and Processes for MEMS and NEMS
Chapter 6 : Metrology and MEMS/NEMS Modeling
 
Part II : Scaling Laws, Actuators, and Power and Brains in Miniature Devices
Introduction to Part II
Chapter 7 : Scaling Laws
Chapter 8 : Actuators
Chapter 9 : Power and Brains in Miniature Devices

Part III : Miniaturization Application
Introduction to Part III
Chapter 10 : MEMS and NEMS Applications

Index